Preview

Journal of Advanced Materials and Technologies

Расширенный поиск

Десорбция газов из материалов катодов в электровакуумных приборах в процессе производства

https://doi.org/10.17277/jamt.2024.04.pp.312-325

Аннотация

Десорбция газов из материалов катодов в электровакуумных приборах (ЭВП) является одной из ключевых проблем в процессе производства, оказывающей существенное влияние на производительность и долговечность таких устройств, как магнетроны, рентгеновские трубки и вакуумные усилители. К примеру, очищение поверхностей деталей ЭВП в процессе производства неизбежно влечет за собой их реакции с компонентами воздуха после извлечения из зоны обработки, а процесс обезгаживающего нагрева во время откачки нередко способствует дополнительному усложнению структуры и химического состава поверхностного слоя, поскольку примеси, диффундирующие к поверхности, могут вызвать появление новых веществ. Поэтому даже при выборе материалов катодов, деталей внутренней арматуры ЭВП руководствуются способностью материала быстро удалять газы, сохранять прочность при высоких температурах и обладать высокой химической устойчивостью. Приведен подробный анализ современных методов ускорения десорбции, механизмов этого процесса и их расчетных основ, включая известные физические законы и модели адсорбции и десорбции. Оценены перспективные подходы к улучшению качества катодов на разных этапах их производства, с акцентом на использование новых материалов и технологий. Проанализированы расчеты, подтверждающие эффективность предложенных решений, а также влияние различных факторов на минимизацию влияния процессов десорбции и повышение долговечности катодов в ЭВП.

Об авторах

А. В. Паращук
Московский физико-технический институт (национальный исследовательский университет)
Россия

Паращук Анастасия Владиславовна, аспирант

Институтский пер., 9, Долгопрудный, 141701



Е. П. Шешин
Московский физико-технический институт (национальный исследовательский университет)
Россия

Шешин Евгений Павлович, доктор физико-математических наук, профессор, заместитель
заведующего кафедрой

Институтский пер., 9, Долгопрудный, 141701



А. В. Шуманов
АО «Плутон»
Россия

Шуманов Алексей Владимирович, начальник
отделения катодно-вакуумных систем

ул. Нижняя Сыромятническая, 11, Москва, 105120



Список литературы

1. Influence of the vacuum state on the field emission properties of the cathode-heating unit of magnetrons with instant readiness. XXVIII Scientific and Technical Conference with the participation of foreign specialists "Vacuum science and technology". Moscow: Nanoindustry; 2021. p. 278-282. (In Russ.)

2. Li IP, Kapustin VI, Ledentsova NE, Shumanov AV. Design features of three-module cathode heating units of magnetrons with instant readiness. XXVIII Scientific and Technical Conference with the participation of foreign specialists "Vacuum science and technology". Moscow: Nanoindustry; 2021. p. 283-288. (In Russ.)

3. Khanbekov IF, Mikhailov VP. Research of the ultrasonic activation processes of diffusion and desorption in electrovacuum devices. XXVIII Scientific and Technical Conference with the participation of foreign specialists "Vacuum science and technology". Moscow: Nanoindustry; 2021. p. 306-310. (In Russ.)

4. Gaertner G. History of vacuum electronics and vacuum electron sources and future development trends. Modern Developments in Vacuum Electron Sources. 135. Cham: Springer; 2020. p. 1-31.

5. Ogura S, Fukutani K. Thermal desorption spectroscopy. Compendium of Surface and Interface Analysis. Singapore: Springer; 2018. p. 719-724.

6. Umirzakov BE, Sadikzhanov Zh, Tashmukhamedova DA, Abduvaitov A, Rabbimov EA. The effect of adsorption of Ba atoms on the composition, emission and optical properties of CdS single crystals. Pis′ma v zhurnal tekhnicheskoy fiziki = Letters to the Journal of Technical Physics. 2021;47(12):3. DOI:10.21883/PJTF.2021.12.51057.18632 (In Russ.)

7. Ubbelohde ARJP, Alfred CE. The kinetics of adsorption processes. Proceedings of the Royal Society of London. Series A, Containing Papers of a Mathematical and Physical Character. 1931;134(824):512-523. DOI:10.1098/rspa.1931.0211

8. Langmuir I. The effect of space charge and residual gases on thermionic currents in high vacuum. Physical Review. 1913;2(6):450-486. DOI:10.1103/PhysRev.2.450

9. Nottingham WB. Thermionic emission. ElectronEmission Gas Discharges I / Elektronen-Emission Gasentladungen I. Berlin: Springer; 1956. V. 4(12). p. 1-175.

10. Wei FG, Hara T, Tsuzaki K. Precise determination of the activation energy for desorption of hydrogen in two Ti-added steels by a single thermaldesorption spectrum. Metallurgical and Materials Transactions B. 2004;35(3):587-597. DOI:10.1007/s11663-004-0057-x

11. Gao J-Y, Yang Y-F, Zhang X-K, Li S-L, et al. A review on recent progress of thermionic cathode. Tungsten. 2020;2(3):289-300. DOI:10.1007/s42864-020-00059-1

12. Ono K, Meshii M. Hydrogen detrapping from grain boundaries and dislocations in high purity iron. Acta Metallurgica et Materialia. 1992;40(6):1357-1364. DOI:10.1016/0956-7151(92)90436-I

13. Sveshnikov VK, Bazarkin AF. Physical model and computer calculation of the diffusion coefficient of sodium into the oxide coating of the cathode. Fundamental′nye Issledovaniya = Fundamental research. 2014;(5-5):990-993. (In Russ.)

14. Seif MN, Balk TJ, Beck MJ. Temperature effects on desorption behavior and characteristic Wulff shapes of scandate cathodes. 2020 IEEE 21st International Conference on Vacuum Electronics (IVEC) 20-23 April 2020. Monterey: IEEE; 2020. p. 83-84. DOI:10.1109/ IVEC45766.2020.9520596

15. Kapustin VI, Li IP, Shumanov AV. Electronic structure of variants of scandate cathodes. XXVIII Scientific and Technical Conference with the participation of foreign specialists "Vacuum science and technology". Moscow: Nanoindustry; 2021. p. 272-277.

16. Dai C, Saidi P, Topping M, Béland LK, et al. A mechanism for basal vacancy loop formation in zirconium. Scripta Materialia. 2019;172:72-76. DOI:10.1016/j.scriptamat.2019.07.006

17. Bouwknegt A, Kooi AG van der. Calorimetric measurements of the emission properties of oxide cathodes in a low-pressure gas discharge. Journal of Physics D: Applied Physics. 1975;8(8):952-963. DOI:10.1088/0022-3727/8/8/009

18. Cherepnin NV. Sorption phenomena in vacuum technology. Moscow: Soviet radio; 1973. p. 383. (In Russ.)

19. Cherepnin NV. The basics of cleaning, decontamination and pumping in vacuum technology. Moscow: Soviet radio; 1967. p. 408. (In Russ.)

20. Kazenas EK, Tsvetkov YuV. Thermodynamics of oxide evaporation. Moscow: URSS; 2008. p. 474. (In Russ.)

21. Chernyak EN, Zakurdaev IV, Shuppe GN, Yakovlev VK. Asymmetric change of the thermoemission current and surface structure in crystals of refractory metals during oriented transfer processes. Bulletin of the Academy of Sciences of the USSR. Physical Series. 1973. (In Russ.)

22. Dyke WP, Charbonnier FM, Strayer RW, Floyd RL, et al. Electrical stability and life of the heated field emission cathode. Journal of Applied Physics. 1960;31(5):790-805. DOI:10.1063/1.1735700

23. Kuchina IYu, Polushin NI, Zakharova ES, Li IP, et al. Experimental support of magnetron nickel oxide cathode fabrication process. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2015;18(4):285-290. DOI:10.17073/ 1609-3577-2015-4-285-290

24. Khanbekov IF, Li IP, Petrov VS, Mikhaylov VP, et al. Research of acoustically stimulated thermal desorption in electrovacuum microwave devices. IOP Conference Series: Materials Science and Engineering. 2018;387:012032. DOI:10.1088/1757-899X/387/1/012032

25. Khanbekov IF, Mikhailov VP. Research of the ultrasonic activation processes of diffusion and desorption in electrovacuum devices. Nanoindustriya. 2022;15(1):20- 27. DOI:10.22184/1993-8578.2022.15.1.20.27 (In Russ.)

26. Liu Y, Tian H, Han Y, Xu Z, et al. Temperature variation of a thermionic cathode during electron emission. Science in China Series E: Technological Sciences. 2008;51(9):1497-1501. DOI:10.1007/s11431-008-0161-2

27. Hara T, Ishiguro T, Shinozaki K. Ultravioletlight-induced desorption of oxygen from SrTiO3 surfaces. Japanese Journal of Applied Physics. 2011;50(4R): 041502. DOI:10.1143/JJAP.50.041502

28. Yates JT, Madey TE. Vibrational spectroscopy of molecules on surfaces. Boston: Springer US; 1987. p. 468.

29. Kolacek K, Schmidt J, Straus J, Frolov O, et al. Interaction of extreme ultraviolet laser radiation with solid surface: ablation, desorption, nanostructuring. SPIE Proceedings XX International Symposium on High-Power Laser Systems and Applications 2014. China: SPIE; 2015. p. 92553U. DOI:10.1117/12.2071273

30. Voronin VI, Lemyakin AA, Zorkina OA. Nest pumping of electrovacuum devices with ion-plasma electrode cleaning. Vestnik Saratovskogo gosudarstvennogo tekhnicheskogo universiteta. 2008;2(1(32)):119-126. (In Russ.)

31. Lu S, Sun X, Zhang B, Wu J. Review of cathode plasma electrolysis treatment: progress, applications, and advancements in metal coating preparation. Materials. 2024;17(16):3929. DOI:10.3390/ma17163929

32. Ramezani M, Mohd RZ, Pasang T, Jiang C-P. Surface engineering of metals: techniques, characterizations and applications. Metals. 2023;13(7): 1299. DOI:10.3390/met13071299

33. Pshyk AV, Petrov I, Bakhit B, Lu J, et al. Energyefficient physical vapor deposition of dense and hard Ti–Al–W–N coatings deposited under industrial conditions. Materials & Design. 2023;227:111753. DOI:10.1016/j.matdes.2023.111753

34. Yang L, Zhang P, Shi J, Liang J, et al. Dual electrolytic plasma processing for steel surface cleaning and passivation. Journal of Materials Engineering and Performance. 2017;26(10):5009-5015. DOI:10.1007/ s11665-017-2826-0

35. Zorkin AYa, Semenov AS, Konyushkov GV. Method of pumping electric vacuum devices. Russian Federation patent 2,185,676. 20 September 2021. (In Russ.)

36. Besozzi E, Maffini A, Dellasega D, Russo V, et al. Nanosecond laser pulses for mimicking thermal effects on nanostructured tungsten-based materials. Nuclear Fusion. 2018;58(3):036019. DOI:10.1088/1741-4326/aaa5d5

37. Lukin VG, Khvostenko OG. Desorption processes in the measurement of weak currents. Physics-Uspekhi. 2020;63(5):487-499. DOI:10.3367/UFNe.2019.07.038615

38. Nikolaev AG, Oks EM, Frolova VP, Yushkov GYu, et al. Effect of the discharge parameters on the generation of deuterium ions in the plasma of a high-current pulsed vacuum arc with a composite zirconium deuteride cathode. Zhurnal tekhnicheskoy fiziki = Technical Physics. 2017; 87(5):681-687. DOI:10.21883/JTF.2017.05.44439.1912 (In Russ.)

39. Santecchia E, Hamouda AMS, Musharavati F, Zalnezhad E, et al. Wear resistance investigation of titanium nitride-based coatings. Ceramics International. 2015;41(9):10349-10379. DOI:10.1016/j.ceramint.2015.04.152

40. Mustata I, Lungu C, Jepu I, Porosnicu C. Thermionic vacuum discharges for thin film depositions. Coatings. 2023;13(9):1500. DOI:10.3390/coatings13091500 41. Menzel D, Gomer R. Desorption from metal surfaces by low-energy electrons. The Journal of Chemical Physics. 1964;41(11):3311-3328. DOI:10.1063/1.1725730

41. Li N, Li X, Zeng B. Field emission and emissionstimulated desorption of ZnO nanomaterials. Applied Sciences. 2018;8(3):382. DOI:10.3390/app8030382

42. Tyurin YuI, Nikitenkov NN, Larionov VV. Ionizing radiation-stimulated diffusion and desorption of hydrogen from metals. Russian Journal of Physical Chemistry A. 2011;85(6):1047-1053. DOI:10.1134/ S0036024411060318

43. Dowell DH, King FK, Kirby RE, Schmerge JF, et al. In situ cleaning of metal cathodes using a hydrogen ion beam. Physical Review Special Topics – Accelerators and Beams. 2006;9(6):063502. DOI:10.1103/ PhysRevSTAB.9.063502

44. Diamond WT. A model of gas desorption and radiation during initial high voltage conditioning in vacuum. Journal of Applied Physics. 2019;126(19):193303. DOI:10.1063/1.5124105

45. Yakunin AN, Aban’shin NP, Akchurin GG, Akchurin GG, et al. On the problems of stability and durability of field-emission current sources for electrovacuum devices. Proceedings SPIE 976, Ultrafast Phenomena and Nanophotonics XX. San Francisco: SPIE; 2016. p. 974620. DOI:10.1117/12.2213218

46. Yafarov RK, Storublev AV. Stability of the emission characteristics of thermal and cold-field cathodes operating in a vacuum. Russian Microelectronics. 2021;50(2):102-107. DOI:10.1134/S1063739721020104

47. Semenov SV, Konyushkov GV, Zorkin AYa. Comprehensive research and analysis of the problems of palladium-barium metal alloy cathodes of high-power vacuum devices. Vakuumnaya tekhnika i tekhnologiya = Vacuum engineering and technology. 2012;45-52. (In Russ.)

48. Bhattacharya R, Turchetti M, Keithley PD, Berggren KK, Browning J. Long term stability study of planar, two-terminal field emitters. 2021 22nd International Vacuum Electronics Conference (IVEC). Rotterdam: IEEE; 2021. p. 1-2. DOI:10.1109/IVEC51707.2021.9722417

49. Khanbekov I, Petrov V, Kopytov D. Determination of vacuum properties of materials in the production of vacuum electronics devices. XXX Scientific and technical conference with the participation of foreign experts ‘Vacuum science and technology’ 2023, 10-14 October. Makhachkala: NOK “Zhuravli”; 2023. p. 49-50.

50. Seif MN, Balk TJ, Beck MJ. Desorption from hot scandate cathodes: effects on vacuum device interior surfaces after long-term operation. Materials. 2020;13(22):5149. DOI:10.3390/ma13225149

51. Pratton M. An introduction to surface physics. Izhevsk: SIC ‘Regular and chaotic dynamics’; 2000. p. 256. (In Russ.)

52. Korzhavy AP, Zvonetsky VI, Mirzoeva SD, Shishkov AV, Alexandrova GN. Method of manufacturing a secondary emission cathode. Russian Federation patent 2,069,915. 25 July 2024. (In Russ.)

53. Ageev VN, Zandberg ÉY, Ionov NI, Tontegode AY. Adsorption-desorption processes on solid surfaces. Soviet Physics Uspekhi. 1983;26(4):382-383. DOI:10.1070/PU1983v026n04ABEH004394

54. Zubenko YuV, Ishmukhamedov MB. The effect of germanium on the adsorption bond of barium with tungsten. Fizika tverdogo tela = Physics of the Solid State. 1983;25(1):180-183. (In Russ.)

55. Kapustin VI, Li IP, Shumanov AV, Lebedinskii YuYu, et al. Physical operating principles of scandate cathodes for microwave devices. Technical Physics. 2017;62(1):116-126. DOI:10.1134/S1063784217010108

56. Santecchia E, Hamouda AMS, Musharavati F, Zalnezhad E, et al. Wear resistance investigation of titanium nitride-based coatings. Ceramics International. 2015;41(9):10349-10379. DOI:10.1016/j.ceramint.2015.04.152

57. Niemelä J-P, Marin G, Karppinen M. Titanium dioxide thin films by atomic layer deposition: a review. Semiconductor Science and Technology. 2017;32(9): 093005. DOI:10.1088/1361-6641/aa78ce

58. Rakhadilov BK, Miniyazov AZh, Skakov MK, Sagdoldina ZhB, et al. Structural modification and erosion of plasma-irradiated tungsten and molybdenum surfaces. Technical Physics. 2020;65(3):382-391. DOI:10.1134/S1063784220030202

59. Lee W-J, Hon M-H. Space-limited crystal growth mechanism of TiO2 films by atomic layer deposition. The Journal of Physical Chemistry C. 2010;114(15):6917- 6921. DOI:10.1021/jp911210q

60. Wang F-Z, Zhang H, Ding B-J, Zhu R-H. A thermionic tungsten cathode activated with nanothoria and prepared by swaging method. Materials Science and Engineering: A. 2002;336(1-2):59-63. DOI:10.1016/S0921-5093(01)01969-4

61. Chao-Long L, Xin Z, Jiu-Xing Z, Fan-Xing Z, et al. Preparation and property of La1–xNdxB6 cathode material. Journal of Inorganic Materials. 2015;30(4):363. DOI:10.15541/jim20140471

62. Chang S-C, Hung S-C, Lin T-C, Yu T-A, et al. Thermal stability of hydrogen annealed aluminum doped zinc oxide films investigated by thermal desorption spectroscopy. 2013 8th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT). Taipei: IEEE; 2013. p. 279-282. DOI:10.1109/IMPACT.2013.6706639

63. Li I. Nanostructures in palladium-barium cathodes of microwave devices. Electronics: Science, Technology, Business. 2018;(5):144-151. DOI:10.22184/1992-4178.2018.176.5.144.151

64. Kapustin VI. Physicochemical foundations of creation of the multicomponent oxide-containing cathode materials. Perspektivnye materialy = Inorganic Materials: Applied Research. 2000;(2):5-17. (In Russ.)

65. Kapustin VI, Li IP, Petrov VS, Ledentsova NE, Turbina AV. Electronic structure and physical-chemical peculiarities of nickel oxide cathode materials. Elektronnaya Tekhnika. Seriya 1: SVCH-Tekhnika. 2016; 1(528):8-18. (In Russ.)

66. Kapustin VI, Li IP, Kozhevnikova NE. Trace impurities have synergistic effects on electronic structure of oxide-nickel cathodes. XXVIII Scientific and Technical Conference with the participation of foreign specialists "Vacuum science and technology". Sudak: Nanoindustry; 2021. p. 267-271. (In Russ.)

67. Norman D, Tuck RA, Skinner HB, Wadsworth PJ, et al. Surface structure of thermionic-emission cathodes. Physical Review Letters. 1987;58(5):519-522. DOI:10.1103/PhysRevLett.58.519

68. Djubua BCh, Koultashev OK, Polivnikova OV. Emission electronics, nanotechnology, synergetics (to the history of ideas in cathode technology). Elektronnaya tekhnika. Seriya 1: SVCH-Tekhnika. 2008;4(497):3-22. (In Russ.)

69. Thomas RE, Morrill CD. Secondary emission properties of impregnated tungsten cathodes. Applications of Surface Science. 1983;16(1-2):292-311. DOI:10.1016/ 0378-5963(83)90075-2

70. Kapustin VI, Li IP, Moskalenko SO, Shumanov AV. Theory of thermionic and secondary emission properties of palladium–barium cathodes of microwave electrovacuum devices. Technical Physics. 2020;65(2):317-323. DOI:10.1134/S1063784220020073

71. Pashkov AN, Romanova YuV, Popov RN, Dubinina OV, Khabachev MN. The development of production technology for cathode alloys based on platinum group metals for high-power electrovacuum microwave devices. Elektronnaya Tekhnika. Seriya 1: SVCH-Tekhnika. 2014;4(523):73-77. (In Russ.)

72. Gaidar AI, Bondarenko GG, Petrov VS, Kashirina NV. Surface processes at the first stage of magnetron cathode Pd–Pd5Ba activation. Vacuum. 2018;154:333-339. DOI:10.1016/j.vacuum.2018.05.024

73. Kostishyn VG, Kaloshkin SD, Adantsov AYu, Ursulyak ND, et al. Stusy of the phase and impurity composition of Pd–Ba and Pt–Ba cathode alloys. Izvestiya Vysshikh Uchebnykh Zavedenii. Materialy Elektronnoi Tekhniki = Materials of Electronics Engineering. 2015;18(3):212-220. DOI:10.17073/1609-3577-2015-3- 212-220 (In Russ.)

74. Zorkin AYa, Myasnikova S. Technology of manufacturing metal-alloy cathodes for millimeter-wave magnetrons. Materials of the XVI scientific and technical conference "Vacuum science and Technology". Moscow: MIEM; 2009. p. 210-212. (In Russ.)

75. Khabachev MN, Makarov AP, Drovnenkova GV, Zhukov YuA, et al. The industrial technology for the production of barium cathode alloys based on platinum and palladium for high-power microwave devices. Elektronnaya Tekhnika. Seriya 1: SVCH-Tekhnika. 2021;(4(551)):49-66. (In Russ.)

76. Li IP, Petrov VS, Polyakov VS, Silaev AD, et al. Simultaneous activation of the autoelectronic and secondary emission cathode of the magnetron with initial start. Izvestiya vysshikh uchebnykh zavedeniy. Elektronika = Semiconductors. 2014;3(107):30-37. (In Russ.)

77. Li IP, Komissarchik SV, Lifanov ND. Magnetron with initial start with special activation of autoelectronic cathodes. Russian Federation patent 2,494,489. 27 September 2013. (In Russ.)

78. Alekseev YuV, Kanicheva IR. Comparison of the emission properties and auger spectrum of an alloy emitter. Bulletin of the Academy of Sciences of the USSR. Physical Series. 1976;40:2587-2590. (In Russ.)

79. Sytnik AYa, Overcooked CH. The change in the emission properties of a cathode based on a palladiumbarium alloy under the influence of ion bombardment under gas discharge conditions. Elektronnaya Tekhnika. Seriya 1: SVCH-Tekhnika. 1977;(12):98-102. (In Russ.)

80. Li IP, Bondarenko GG. The use of hydrogenvacuum treatment of palladium powders to obtain effective metal-alloy cathodes of a steel magnetron. Perspektivnyye materialy = Inorganic Materials: Applied Research. 2012;(1);30-34. (In Russ.)

81. Swanwick ME, Keathley PD, Kartner FX, Velasquez-Garcia LF. Ultrafast photo-triggered field emission cathodes using massive, uniform arrays of nanosharp high-aspect-ratio silicon structures. 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers & Eurosensors XXVII). Barcelona: IEEE; 2013. p. 2680-2683. DOI:10.1109/Transducers.2013.6627358

82. Nechaev YS, Denisov EA, Cheretaeva AO, Shurygina NA, et al. Method of thermal desorption study of hydrogen states in carbon materials and nanomaterials. Physics-Uspekhi. 2023;66(09):936-942. DOI:10.3367/UFNe.2022.11.039274

83. Rochanachirapar W, Murakami K, Yamasaki N, Abo S, et al. Influence of gas atmosphere during laser surface treatment of CNT cathode. Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737). Cambridge: IEEE; 2004. p. 144-145. DOI:10.1109/IVNC.2004.1354941

84. Arkhipov AV, Gabdullin PG, Gnuchev NM, Davydov SN, et al. Field-induced electron emission from nanoporous carbon of various types. St. Petersburg Polytechnical University Journal: Physics and Mathematics. 2015;1(1):47-55. DOI:10.1016/j.spjpm.2015.03.011

85. Fursey GN, Polyakov MA, Kantonistov A, Yafyasova M, et al. Autoelectronic and explosive emission from graphene-like structures. Zhurnal tekhnicheskoy fiziki = Technical Physics. 2013;83(6):71-77. (In Russ.)

86. Bernatsky DP, Pavlov V. Field electron microscopy of carbonized rhenium. Pis′ma v zhurnal tekhnicheskoy fiziki = Technical Physics Letters. 2017; 43(12):104. DOI:10.21883/PJTF.2017.12.44715.16748. (In Russ.)

87. Krachkovskaya TM, Storublev AV, Sahaji GV, Yemelyanov AS. Investigation of the characteristics of a metal-porous cathode modified with nanocarbon. Collection of articles VII of the All-Russian Conference. ”Microwave Electronics and Microelectronics". St. Petersburg: St. Petersburg State Technical University ”LETI“; 2018. p. 155-159. (In Russ.)

88. Krachkovskaya TM, Melnikov LA. Emission properties of metal-porous cathodes modified with nanocarbon. Pis′ma v zhurnal tekhnicheskoy fiziki = Technical Physics Letters. 2018;44(22):11-18. (In Russ.)


Рецензия

Для цитирования:


Паращук А.В., Шешин Е.П., Шуманов А.В. Десорбция газов из материалов катодов в электровакуумных приборах в процессе производства. Journal of Advanced Materials and Technologies. 2024;9(4):312-325. https://doi.org/10.17277/jamt.2024.04.pp.312-325

For citation:


Parashchuk A.V., Shehin E.P., Shumanov A.V. Desorption of gases from cathode materials in electrovacuum devices during the production process. Journal of Advanced Materials and Technologies. 2024;9(4):312-325. https://doi.org/10.17277/jamt.2024.04.pp.312-325

Просмотров: 28

JATS XML


Creative Commons License
Контент доступен под лицензией Creative Commons Attribution 4.0 License.


ISSN 2782-2192 (Print)
ISSN 2782-2206 (Online)